【摘要】 扫频非线性是制约扫频干涉绝对距离测量精度进一步提高的主要因素之一。对此，文章提出基于平行平板等倾干涉搭建扫频干涉非线性校正系统，在进行距离测量的同时实时测量激光输出频率扫描量，经过推导得出被测距离等于测量光路和辅助干涉仪干涉条纹明暗变化次数之比与辅助干涉仪光程差乘积的一半，而与频率扫描量无关，从而减小了扫频非线性误差。试验结果表明：该方法的测量误差低于0.2 mm，实现了短距离高精度测量。更多还原

【Abstract】 Frequency scanning nonlinearity is one of the primary factors limiting further improvement of measurement accuracy in optical frequency scanning interferometry(OFSI)absolute ranging. To address this issue,this article proposes the establishment of a frequency scanning interferometry nonlinearity correction system based on parallel plate equal-inclination interference. This system enables real-time measurement of the laser output frequency scanning volume during distance measurement. Through derivation,it is demonstrated that the measured distance equals half the product of the ratio of interference fringe brightness/darkness change counts between the measurement path and the auxiliary interferometer,and the optical path difference of the auxiliary interferometer,while being independent of the frequency scanning volume. Consequently,this approach reduces errors caused by sweep frequency nonlinearity. Experimental results indicate that the measurement error of this method is below 0.2 mm,achieving high-precision short-distance measurement.更多还原