【摘要】 针对微操作与微装配领域的多自由度、宏行程以及高精度运动需求，提出压电粘滑驱动的二自由度跨尺度并联式解耦运动平台。采用压电纤维致动柔顺机构，设计驱动-结构一体式拱型驱动单元，实现纳米级运动分辨率、提高单步输出位移并使二维平面运动解耦。然后，利用粘滑驱动原理实现宏行程运动，并采用万向轴承与可调支撑柱提高承载能力。之后，通过有限元法建立平台理论模型，并对其输出位移和固有频率进行仿真分析。最后，搭建实验平台测试相关性能。实验结果表明：连续步进运动时，压电粘滑运动平台沿x、y向平动的最大单步位移分别为249.6μm和237.3μm，运动范围为16.10 mm×16.08 mm；即使垂直负载为30 N时，粘滑运动平台仍有16.0μm的单步输出位移。此外，单步精密运动时，位移分辨率分别为6.3 nm和6.8 nm。因此，所设计的压电粘滑运动平台可以满足多维跨尺度微纳运动需求。更多还原

【Abstract】 Regarding the multi-degree-of-freedom, macro-stroke, and high-precision motion requirements in micro-manipulation and micro-assembly fields, a two-degree-of-freedom cross-scale parallel decoupled motion platform with piezoelectric stick-slip actuation was proposed. Macro fiber composites were used to actuate compliant mechanisms to design an integrated drive-structure arch-shaped driving unit, achieving nanometer-level motion resolution, enhancing single-step output displacement, and enabling two-dimensional planar motion decoupling. Subsequently, stick-slip driving principles were utilized to achieve macrostroke motion, while universal bearings and adjustable support were employed to enhance load-bearing capacity. A theoretical model of the platform was established using the finite element method, and simulations were conducted to analyze its output displacement and natural frequency. Finally, an experimental platform was constructed to test the relevant performance. Experimental results show that during continuous stRegarding the multi-degree-of-freedom, macro-stroke, and high-precision motion requirements in micro-manipulation and micro-assembly fields, a two-degree-of-freedom cross-scale parallel decoupled motion platform with piezoelectric stick-slip actuation is proposed. Macro fiber composites are used to actuate compliant mechanisms to design an integrated drive-structure arch-shaped driving unit, achieving nanometer-level motion resolution, enhancing single-step output displacement, and enabling two-dimensional planar motion decoupling. Subsequently, stick-slip driving principles are utilized to achieve macro-stroke motion, while universal bearings and adjustable support are employed to enhance load-bearing capacity. A theoretical model of the platform is established using the finite element method, and simulations are conducted to analyze its output displacement and natural frequency. Finally, an experimental platform was constructed to test the relevant performance. ep motion, the maximum single-step displacements of the piezoelectric stick-slip motion platform along the x and y axes are 249. 6 μm and 237. 3 μm, respectively, with a motion range of 16. 10 mm × 16. 08 mm. Even under a vertical load of 30 N, the stick-slip motion platform still achieves a single-step output displacement of 16 μm. Additionally, the translational displacement resolutions are 6. 3 nm and 6. 8 nm during single-step precision motion, respectively. Therefore, the designed piezoelectric stick-slip motion platform can meet the multi-dimensional, cross-scale micro-nano motion requirements.更多还原