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B2O3和Al2O3对MgO-Al2O3-SiO2玻璃结构和性能的影响
Effect of B2O3 and Al2O3 on Structure and Properties of MgO-Al2O3-SiO2 Glass
【摘要】 在集成电路向精密化、微型化发展的趋势下，具有低热膨胀系数、低介电常数的电子玻璃成为半导体封装、精密仪器基板等领域的关键基础材料。本文采用傅里叶变换红外光谱（FT-IR）、拉曼光谱、核磁共振（NMR）波谱、差示扫描量热（DSC）、热膨胀分析及介电性能测试（10 MHz）等方法，研究B2O3和Al2O3的引入量对MgO-Al2O3-SiO2无碱低热膨胀系数玻璃网络结构、热膨胀性能和介电性能的影响。结果表明，当m（B2O3）/m（Al2O3）（质量比）从0.324增加到0.400时，玻璃网络的聚合度增加，热膨胀系数从3.68×10-6℃-1降至3.59×10-6℃-1，介电常数和介电损耗分别从5.00和2.83×10-3降至4.90和2.75×10-3；当m（B2O3）/m（Al2O3）升至0.485时，玻璃网络的聚合度降低，热膨胀系数回升至3.62×10-6℃-1，介电常数和介电损耗升至4.91和2.78×10-3。而随着m（B2O3）/m（Al2O3）升至0.581时，玻璃成型过程中发生分相。因此，较合适的B2O3引入量为7%（质量分数，下同），Al2O3引入量为17.5%,m（B2O3）/m（Al2O3）为0.400，此时玻璃的热膨胀系数最低(3.59×10-6℃-1)，介电常数和介电损耗分别为4.90和2.75×10-3。
【Abstract】 Under the trend of integrated circuits developing toward precision and miniaturization, electronic glass with a low coefficient of thermal expansion（CTE） and a low dielectric constant has become a key basic material for applications such as semiconductor packaging and precision instrument substrates. This study employed Fourier transform infrared spectroscopy（FT-IR）, Raman spectroscopy, nuclear magnetic resonance（NMR） spectroscopy, differential scanning calorimetry（DSC）, thermal expansion analysis, and dielectric property measurements（10 MHz） to investigate the influences of the introduction amounts of B2O3 and Al2O3 on the network structure, thermal expansion properties, and dielectric properties of MgO-Al2O3-SiO2 alkali-free low thermal expansion coefficient glass. The results show that when the m（B2O3）/m（Al2O3）（mass ratio） increases from 0. 324 to 0. 400, the degree of glass network polymerization increases, correspondingly, the CTE decreases from 3. 68×10-6 ℃-1 to 3. 59×10-6 ℃-1, the dielectric constant and dielectric loss decrease from 5. 00 and 2. 83×10-3 to approximately 4. 90 and 2. 75×10-3, respectively. When the m（B2O3）/m（Al2O3） rises to 0. 485, the degree of glass network polymerization decreases; the CTE rebounds to 3. 62×10-6 ℃-1, the dielectric constant and dielectric loss increase to 4. 91 and 2. 78×10-3, respectively. When the m（B2O3）/m（Al2O3） further increases to 0. 581, phase separation occurs during glass formation. Therefore, the appropriate introduction amount of B2O3 is 7%（mass fraction, the same below）, with an Al2O3 content of 17. 5% and a m（B2O3）/m（Al2O3） of 0. 400. At this point, the glass exhibits the lowest coefficient of thermal expansion(3. 59×10-6 ℃-1), with a dielectric constant of 4. 90 and a dielectric loss of 2. 75×10-3.
【Key words】 B2O3； Al2O3； coefficient of thermal expansion； NMR； low dielectric constant； alkali-free glass；
- 【文献出处】 硅酸盐通报 ,Bulletin of the Chinese Ceramic Society , 编辑部邮箱 ,2026年03期
- 【分类号】TQ171.1
- 【下载频次】26