【摘要】 基于薄膜铌酸锂材料平台，设计并制备了一种低损耗、低串扰4×4通道阵列波导光栅，通道间隔400 GHz，在器件结构上，将阵列波导光栅（AWG）的对称轴沿铌酸锂晶体45°光轴排布，有效补偿了各向异性带来的相位误差。测试结果表明，该器件的平均插入损耗为5.7 dB，相邻通道间串扰低至-20.6 dB，对实现光子集成芯片的小型化、高集成化以及低功耗具有重要的意义。更多还原

【Abstract】 A low-loss and low-crosstalk 4×4 arrayed waveguide grating(AWG) with a 400 GHz channel spacing was designed and fabricated on a thin-film lithium niobate(TFLN) platform. In terms of device structure, the symmetry axis of the AWG was aligned along the 45° optical axis of the lithium niobate crystal, which could effectively compensate for phase errors induced by anisotropy. Measurement results demonstrated an insertion loss of 5.7 dB, and an adjacent channel crosstalk as low as-20.2 dB. This work is of great significance for achieving miniaturized, highly integrated and low-power photonic integrated circuits.更多还原