【摘要】 空间光通信、核电站等极端环境对光子集成器件的可靠性与稳定性提出了苛刻要求。传统硅基波导在上述场景中面临严重的性能退化风险，主要源于其固有的抗辐照能力不足及化学敏感性。为此，本文设计并研究了一种具有抗辐照特性和化学稳定性的基于Ta₂O₅的新型光波导。基于经典电磁理论对波导结构进行了设计优化，并通过实验验证该波导具有较低的损耗和理想的光模式限制能力。此外，其制备工艺与现有半导体技术兼容，具备良好的集成潜力，可进一步制成FP（Fabry-Pérot cavity，法布里-珀罗谐振腔）波导、光栅波导等选模器件实现对光子的传输与调控。本研究为在强辐照、高腐蚀等特殊环境下稳定工作的光通信与传感系统提供了一种高性能、高可靠性的波导方案，展现出广阔的应用前景。更多还原

【Abstract】 Extreme environments such as space optical communication and nuclear power plants impose strict requirements on the reliability and stability of photonic integrated devices. Traditional silicon-based waveguides face a serious risk of performance degradation in the above scenarios, mainly due to their inherent insufficient radiation resistance and chemical sensitivity. For this purpose, this paper designs and studies a new type of optical waveguide based on Ta₂O₅ with radiation resistance and chemical stability. The waveguide structure was designed and optimized based on classical electromagnetic theory, and experiments verified that the waveguide has low loss and ideal optical mode limitation capability. In addition, its preparation process is compatible with existing semiconductor technologies and has good integration potential. It can be further fabricated into FP（Fabry-Pérot cavity） waveguides, grating waveguides and other modeselecting devices to achieve the transmission and control of photons. This research provides a high-performance and highly reliable waveguide scheme for optical communication and sensing systems that can operate stably in special environments such as strong irradiation and high corrosion, demonstrating broad application prospects.更多还原