【摘要】 压电泵是一种利用压电材料逆压电效应实现液体定向流动的新型微流体输送仪器。由于压电材料的变形非常微小，限制了其输出能力；同时常规的压电泵工作频率较低，不能充分利用压电材料高频率下功率密度高的优势。为此，利用柔性铰链位移放大机构放大压电陶瓷的位移输出，并使其对称驱动2个压电容积泵，研制一种新型的层叠式双腔并联压电泵。通过有限元分析软件对柔性铰链放大机构以及压电泵简易模型进行仿真分析。结果显示：所设计的柔性铰链位移放大机构放大倍数可达4.2,在对称驱动条件下压电泵工作频率最高可达4 218 Hz,极大地提高了压电泵的理论工作频率。更多还原

【Abstract】 Piezoelectric pump is a new microfluidic conveying instrument which realizes directional flow of liquid by using inverse piezoelectric effect of piezoelectric materials. To address the problems of limited output capacity due to very small deformation of piezoelectric material and the low conventional piezoelectric pump operating frequency leading to failure in takeing full advantage of the high power density of piezoelectric materials at high frequency, a novel laminated double-cavity parallel piezoelectric pump is developed by using flexure hinge displacement amplifying mechanism to amplify the output displacement of piezoelectric ceramics which drives two piezoelectric positive pumps symmetrically. Through finite element analysis, the flexible hinge amplifying mechanism and the simple model of the piezoelectric pump are simulated. The results show that the magnification of the flexible hinge displacement amplifying mechanism can reach 4.2, and the working frequency of the piezoelectric pump can be as high as 4 218 Hz under the symmetric driving condition, which greatly improves the theoretical working frequency of the piezoelectric pump.更多还原