【摘要】 含有数字微镜阵列（DMD）的长波红外偏振光学系统中产生的衍射现象会导致系统中偏振像差发生变化，从而造成长波红外偏振光学系统偏振测量精度下降。针对这一问题，提出一种含DMD的长波红外二次成像光学系统偏振像差分析及补偿方法。首先，基于长波红外偏振光学系统中波长与DMD像元尺寸的比值构建衍射与偏振像差特性传输模型，提出基于矢量衍射—偏振光琼斯矢量理论的偏振像差分析方法。其次，推导DMD的偏振像差和偏振度情况，确定DMD的最佳衍射级次、入射角与衍射效率，进而设计含DMD的二次成像长波红外偏振光学系统，得到DMD衍射特性对偏振像差的影响情况。最后，通过倾斜投影物镜、镜片镀膜及减小表面入射角来补偿光学系统的偏振像差，以解决衍射现象对长波红外偏振光学系统偏振像差产生的影响。仿真结果表明，系统全视场调制传递函数在截止频率处均接近衍射极限，最大畸变小于0.2%，成像质量良好，整体系统的二向衰减经补偿后减小到原来的1/12。该分析模型能够揭示衍射与偏振像差之间的关系，该补偿方法可以有效降低偏振像差。更多还原

【Abstract】 Aiming at the problem that the diffraction phenomenon generated in the long-wave infrared (LWIR) polarized optics system containing digital micro-mirror device(DMD) will lead to the change of the polarization aberration in the system, which will cause a decrease in the accuracy of the polarization measurement of the LWIR polarized optics system, we propose a method for analyzing and compensating for the polarization aberration of the LWIR secondary imaging optical system containing DMD. Firstly, Based on the ratio of wavelength to DMD pixel size in the LWIR polarized optics system, a diffraction and polarization aberration characteristic transmission model is constructed and a polarization aberration analysis method based on the Jones vector theory of vector diffraction-polarized light is proposed. Secondly, the polarization aberration and polarizability of DMD are deduced to determine the optimal diffraction order, incidence angle and diffraction efficiency of DMD, and then the secondary imaging LWIR polarized optics system containing DMD is designed to obtain the influence of DMD diffraction characteristics on polarization aberration.Finally, the polarization aberration of the optical system is compensated by tilting the projection objective,coating the lens and reducing the surface incidence angle, so as to solve the influence of diffraction phenomenon on the polarization aberration of the LWIR polarized optical system. Simulation results show that the full-field-of-view modulation transfer function of the system is close to the diffraction limit at the cut-off frequency, the maximum aberration is less than 0.2%, the imaging quality is good, and the two-way attenuation of the whole system is reduced to 1/12 of the original one after compensation. This analytical model can reveal the relationship between diffraction and polarization aberration, and the compensation method can effectively reduce the polarization aberration.更多还原