【摘要】 研究了基于X切LNOI（LiNbO₃ on Insulator）衬底的声表面波谐振器。在保持谐振器品质因数（Q）值不变的情况下，采用电极假指长度加权的方法来抑制横向模态。设计并制备了不同结构的加权电极结构谐振器，系统地探讨了电极加权周期及幅值对横向模态的影响规律。通过对比分析，确定了在频率2.5 GHz下X切LNOI结构的最佳加权电极结构。实验结果表明，调整加权电极的设计可以有效抑制因X切LN（LiNbO₃）材料引发的横向模态，进而优化谐振器的性能。更多还原

【Abstract】 In this study,a surface acoustic wave （SAW） resonator,based on an X-cut LiNbO₃-on-Insulator（LNOI） substrate,is investigated.Pseudofinger length weighting techniques is used to suppress transverse modes while precisely maintaining the resonator’s quality factor （Q factor）.SAW resonators with different weighting electrodes are designed and fabricated.Then,the effects of weighting period and amplitude on the transverse modes are systematically investigated.A comparative analysis reveals the optimal weighted electrode configuration for the X-cut LNOI SAW resonator at a frequency of 2.5 GHz.Experimental results show that the weighted electrode effectively mitigates transverse modes induced by the X-cut LiNbO₃ material,thereby enhancing the overall performance of the SAW resonator.更多还原