【摘要】 仿真设计了一款新颖的可重构声表面波（SAW）谐振器。该设计将相变材料二氧化钒（VO₂）与谐振器集成在同一芯片上，实现了紧凑的可重构谐振器。利用VO₂的相变特性，以VO₂替代SAW谐振器的部分电极。通过温度控制SAW谐振器中VO₂电极的工作状态，实现SAW谐振器频率在两种不同状态之间的调谐。设计的电极宽度为1.15μm（理论波长λ为4.6μm）的可重构谐振器，仿真结果显示其频率可在472 MHz和774 MHz两种状态下进行调谐，机电耦合系数分别为7.1%和5.6%，同时调谐范围高达302 MHz。为使设计的可重构谐振器具有更优的性能，对可重构谐振器的电极厚度进行参数化仿真，当电极厚度为0.12λ时，SAW谐振器的机电耦合系数最高，为后续可重构SAW滤波器提供了更大的带宽。同时还提出了基于VO₂的可重构SAW谐振器的工艺流程思路，这为设计应用于实际提供了指导。更多还原

【Abstract】 A novel reconfigurable surface acoustic wave （SAW） resonator has been designed through simulation.The design integrates vanadium dioxide （VO₂）,a phase-change material,with the resonator on a single chip to achieve a compact reconfigurable resonator.By utilizing the phase-change properties of VO₂,portions of the SAW resonator’s electrodes are replaced with VO₂.The operating state of these VO₂ electrodes is thermally controlled,enabling frequency tuning between two different states.With an electrode width of 1.15μm （corresponding to a theoretical wavelengthλof 4.6μm）,simulation results demonstrate that the reconfigurable resonator’s frequency can be tuned to 472 MHz and 774 MHz,exhibiting electromechanical coupling coefficients of 7.1% and 5.6%,respectively,and the tuning range of the resonator peaks at 302 MHz.Parametric simulations of electrode thickness reveal that the SAW resonator attains its highest electromechanical coupling coefficient at 0.12λ，which facilitates broader bandwidth for subsequent reconfigurable SAW filters.Additionally,we propose a fabrication process for VO₂-based reconfigurable SAW resonators,offering practical design guidance.更多还原