【摘要】 微机械电子系统陀螺仪在加工制造过程中由于工艺缺陷造成陀螺弹性主轴发生偏斜，从而产生正交误差。为了减小正交误差对陀螺仪性能的影响，对四质量块微机械陀螺仪正交误差校正方法进行了研究。首先，对正交误差产生的原因及其对输出的影响进行了分析；其次，对两种正交刚度校正结构进行了分析，并以此为基础，提出了一种四质量块陀螺仪正交误差的整体校正法；最后，对正交误差校正前后的陀螺仪性能进行实验测试。测试结果表明，正交校正后陀螺仪零角速度输出为5.5 mV,与校正前相比降低了92.6%。证明了四质量块微机械陀螺仪正交误差整体校正法的有效性。更多还原

【Abstract】 Micro-electromechanical system(MEMS) gyroscopes often suffer from quadrature error due to offset of elastic axis caused by manufacturing defects during processing and manufacturing process.To reduce the impact of quadrature error on gyroscope performance, a correction method for the quadrature error in a quad-mass MEMS gyroscope was investigated.First, an analysis of the causes of quadrature error and its impact on the output was performed.Second, two correction structures for quadrature stiffness were analyzed.Based on this, a holistic correction method of quadrature error for quad-mass gyroscope was proposed.Finally, experimental tests were performed to compare the gyroscope performance before and after quadrature error correction.The results show that the zero angular velocity output of the gyroscope after quadrature correction is 5.5 mV,representing reduction of 92.6% compared to before correction.The method of holistic correction of quadrature error for quad-mass MEMS gyroscope is demonstrated to be effective.更多还原