【摘要】 为实现恶劣环境下温度的准确测量，以硅酸镓镧结构（LGS）为压电基底，Pt为电极，Al₂O₃为保护层制备了一种单端口谐振型SAW温度传感器。通过实验探究了结构参数对传感器性能的影响，设计并开发了螺旋偶极子天线和陶瓷封装。结果表明：综合考虑叉指换能器和反射栅之间的距离L_g对温度信号识别和SAW传感器性能的影响，L_g选择λ/8或者5λ/8;温度敏感性随着电极宽度增加而降低；通过对SAW传感器芯片、天线和陶瓷封装集成，在室温到600℃下实现了温度的无线稳定测量。更多还原

【Abstract】 In order to realize accurate temperature measurement in harsh environments, a one-port resonant SAW temperature sensor was prepared by using LGS as the piezoelectric substrate, Pt as the electrode, and Al₂O₃ as the protective layer.The effects of the structural parameters on the performance of the sensor were explored experimentally.A helical dipole antenna and a ceramic package structure were designed and developed.The results show the combined effect of considering the distance L_g between the interdigital transducer and the reflective grating on the temperature signal recognition and the performance of the SAW sensor, L_g should be chosen as λ/8 or 5λ/8.Temperature sensitivity decreases with increasing electrode width.By integrating the SAW sensor chip, antenna, and ceramic package, wireless stable measurement of temperature at room temperature up to 600 ℃ is achieved.更多还原