【摘要】 为满足超声检测技术对超声换能器聚焦特性的要求，设计了一种基于聚合物薄膜SU-8的CMUT阵列。根据阵列换能器的声场理论确定影响聚焦效果的参数，利用COMSOL Multiphysics仿真软件进行建模仿真分析，探究了空气和水介质中一维CMUT线阵不同阵元数目和阵元间距时的声场聚焦性。结果表明：CMUT阵列为16阵元、阵元间距为0.5时，阵列换能器的声场聚焦效果最好，声场聚焦区域声压最大值在空气介质中达到7.23×10^-5Pa，水介质中达到0.17 Pa。更多还原

【Abstract】 To meet the requirements of ultrasonic testing technology for the focusing characteristics of ultrasonic transducers, a CMUT array based on polymer film SU-8 was designed. Based on the acoustic field theory of the array transducer, the parameters affecting the focusing effect were determined. COMSOL Multiphysics simulation software was used for modeling and simulation analysis to explore the acoustic field focusability of one-dimensional CMUT linear array in air and water media with different number and spacing of elements. The results show that the acoustic field focusing effect of the array transducer is the best when the CMUT array has 16 elements and the array element spacing is 0.5. The maximum sound pressure in the focusing area of the sound field reaches 7.23 ×10^-5Pa in air medium and 0.17 Pa in water medium.更多还原