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产教融合下的集成电路制造实践教学模式探索——以“试验设计”为例

Exploration on Integrated Circuits Manufacturing Practical Teaching Model Based on Industry-Education Integration——A Case Study of “Design of Experiment”

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【作者】 刘冬朱辰杨斯元高大为程然

【Author】 LIU Dong;ZHU Chen;YANG Siyuan;GAO Dawei;CHENG Ran;National Institute of Excellence for Engineers, Zhejiang University;College of Integrated Circuits, Zhejiang University;Zhejiang Technology Innovation Center of CMOS IC Manufacturing Process and Design;Zhejiang IC Sprout Semiconductor Co., Ltd.;

【通讯作者】 程然;

【机构】 浙江大学国家卓越工程师学院浙江大学集成电路学院浙江省CMOS集成电路成套工艺与设计技术创新中心浙江创芯集成电路有限公司

【摘要】 针对我国集成电路制造专业实践人才培养过程中存在实践平台缺乏、企业参与不足、重专业轻工程等问题,本研究依托我校特色的2.54 cm(12 in)55 nm CMOS集成电路芯片设计与制造成套工艺技术研发平台资源,探索了产教融合的集成电路制造卓越工程师队伍实践教学模式。围绕集成电路制造大生产成套工艺开发工程需求,校企协同设计多学科交叉、紧密衔接产业的实践教学课程体系。以“试验设计”为例,详细论述了该模式下的实践课程建设背景、内容设计、实施过程与成效。实践结果表明:该模式明显改善了集成电路制造专业研究生产业工程实践能力薄弱的问题,强化了学生对集成电路制造的实践认知与工程核心技能;同时,提升了我校12 in CMOS成套工艺平台的技术创新与科研成果转化能力,是贯彻实施我国集成电路领域人才、教育、科技一体化发展的有力举措。

【Abstract】 Addressing the problems in China’s IC manufacturing talent cultivation, including inadequate practical platforms, limited industry engagement, and overemphasis on specialization over engineering skills, by utilizing our university’s unique 12-inch 55 nm CMOS IC chip design and fabrication process technology R&D platform, we developed an industry-education collaborative training model for cultivating outstanding engineers in IC manufacturing by facing on the demand of IC fabrication complete set of process flow develop, industry-academia collaborative designed interdisciplinary and industry-aligned practical teaching courses. Taking designment of experiment(DOE) as an example, this paper discusses the creative model guided practical courses’ developing background, content design, implementation process and effects. The practice demonstrates that the new teaching model obviously improves students’ lack of industry basic engineering technique, strengthens students’ engineering cognition and core engineer competencies. Meanwhile, it enhances the public platform technological innovation ability and transformation of scientific research achievements. This practical teaching model is a powerful measure to implement the integrated development of talent, education, and science & technology in China’s integrated circuits field.

【基金】 浙江省自然科学基金(LTGC24F040001);国家自然科学基金重大研究计划(92464205);浙江省“十四五”第二批研究生教学改革项目(JGCG2024038)
  • 【文献出处】 实验室研究与探索 ,Research and Exploration in Laboratory , 编辑部邮箱 ,2025年09期
  • 【分类号】TN405-4;G642
  • 【下载频次】183
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