【摘要】 为了得到人体运动状态信息，需精准测量人体关节处的应变，提出了一种制作柔性电容式传感器的方法。采用聚二甲基硅氧烷（PDMS）薄膜作为传感器的介电层，设计了丝网印板的图案，采用丝网印刷的方法将电极材料印刷在介电层薄膜上，使其作为电极层，形成了具有“三明治”结构的柔性电容式传感器单元。然后，将2个传感器单元贴合在一起，制备为双层柔性电容式传感器。将其放置在测试平台上进行测试。实验结果表明，双层传感器的电极层厚度均匀，其值约为60μm。双层传感器具有更高的初始电容，其值为1.793 nF,在相同应变下，能得到更大的电容变化量，即具有更高的分辨率，能检测到1%的应变。无论是在压力测试还是应变测试下，双层传感器均比单层传感器具有更高的灵敏度(S=0.29 kPa^-1,GF=0.73),并且，具有较好的耐疲劳性和稳定性。更多还原

【Abstract】 In order to obtain information about the human body’s motion status, the strain at the human joints needed to be measured accurately, and a method to fabricate flexible capacitive sensors was proposed. A polydimethylsiloxane（PDMS） film was used as the dielectric layer of the sensor, and a screen-printed plate pattern was designed. The electrode material was printed on the dielectric film using screen-printing to act as the electrode layer, forming a flexible capacitive sensor unit with a ‘sandwich’ structure. The two sensor units were then laminated together to form a double-layer flexible capacitive sensor. It was placed on the test bench for testing. The experimental results showed that the thickness of the electrode layer of the bilayer sensor was uniform, which was about 60 μm. The bilayer sensor had a higher initial capacitance（1.793 nF）, which gave a larger amount of capacitance change under the same strain, which meant that it had a higher resolution, and was able to detect a strain of 1%.The double-layer sensor had higher sensitivity(S=0.29 kPa^-1,GF=0.73) than the single-layer sensor both under pressure test and strain test, and had better fatigue resistance and stability.更多还原