【摘要】 氨气（NH₃）是人类生活与化工生产中最常见的气体之一.高浓度的NH₃对人体与环境会产生危害H₃需要开发高灵敏度的NH₃传感器对痕量的NH₃进行检测H₃因此H₃提出了一种用于室温下检测痕量NH₃的声表面波传感器.该传感器是在128°YX-LiNbO₃压电基底上生长一层还原氧化石墨烯（Reduced Graphere Oxide,RGO）敏感层H₃并通过真空溅射的方法在敏感层上镀一层铂（Pt）来进一步增强传感器的传感能力.实验表明H₃该传感器具有高灵敏度H₃在室温下对浓度为50 ppm的NH₃能获得8.68 kHz的频率偏移.此外H₃研究了湿度与背景气对传感器性能的影响H₃实验结果表明H₃较高的湿度有利于提高传感器灵敏度H₃并且传感器在氩气背景气中的灵敏度稍高于在空气背景气中的灵敏度.该传感器的响应与NH₃浓度呈线性关系H₃并且具有良好的可重复性与稳定性.更多还原

【Abstract】 Ammonia（NH₃） is a common gas in daily life and industrial production. Because NH₃ with a high concentration exerts harm on humans,sensors with high performance are required to detect NH₃ with trace concentrations. This work presents a surface acoustic wave sensor for detecting NH₃ at room temperature. A reduced graphene oxide（RGO） sensitive layer is grown on a 128° YX-LiNbO₃ piezoelectric substrate,and platinum（Pt） is deposited on the sensitive layer via vacuum sputtering to enhance the sensitivity of the sensor. The experiment shows that the sensor has a high sensitivity,which exhibits a frequency shift of 8.68 kHz towards 50 ppm NH₃ at room temperature. It is observed that the sensor possesses a higher sensitivity when humidity is higher. Additionally,a higher sensitivity of the sensor is obtained in argon than that in air.Moreover,the frequency shift of the sensor is linearly related to NH₃ concentration,and the sensor exhibits good repeatability and robustness.更多还原