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一种声表面波NH3传感器的研制及性能优化
Preparation and performance study of a surface acoustic wave NH3 sensor
【摘要】 氨气(NH3)是人类生活与化工生产中最常见的气体之一.高浓度的NH3对人体与环境会产生危害H3需要开发高灵敏度的NH3传感器对痕量的NH3进行检测H3因此H3提出了一种用于室温下检测痕量NH3的声表面波传感器.该传感器是在128°YX-LiNbO3压电基底上生长一层还原氧化石墨烯(Reduced Graphere Oxide,RGO)敏感层H3并通过真空溅射的方法在敏感层上镀一层铂(Pt)来进一步增强传感器的传感能力.实验表明H3该传感器具有高灵敏度H3在室温下对浓度为50 ppm的NH3能获得8.68 kHz的频率偏移.此外H3研究了湿度与背景气对传感器性能的影响H3实验结果表明H3较高的湿度有利于提高传感器灵敏度H3并且传感器在氩气背景气中的灵敏度稍高于在空气背景气中的灵敏度.该传感器的响应与NH3浓度呈线性关系H3并且具有良好的可重复性与稳定性.
【Abstract】 Ammonia(NH3) is a common gas in daily life and industrial production. Because NH3 with a high concentration exerts harm on humans,sensors with high performance are required to detect NH3 with trace concentrations. This work presents a surface acoustic wave sensor for detecting NH3 at room temperature. A reduced graphene oxide(RGO) sensitive layer is grown on a 128° YX-LiNbO3 piezoelectric substrate,and platinum(Pt) is deposited on the sensitive layer via vacuum sputtering to enhance the sensitivity of the sensor. The experiment shows that the sensor has a high sensitivity,which exhibits a frequency shift of 8.68 kHz towards 50 ppm NH3 at room temperature. It is observed that the sensor possesses a higher sensitivity when humidity is higher. Additionally,a higher sensitivity of the sensor is obtained in argon than that in air.Moreover,the frequency shift of the sensor is linearly related to NH3 concentration,and the sensor exhibits good repeatability and robustness.
- 【文献出处】 南京大学学报(自然科学) ,Journal of Nanjing University(Natural Science) , 编辑部邮箱 ,2025年01期
- 【分类号】X851;TP212
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