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印刷薄膜晶体管材料与器件技术研究进展
Printed thin film transistor materials and device technology
【摘要】 聚焦溶液印刷工艺制备薄膜晶体管(TFT)技术,综述了近年来印刷TFT材料与器件研究成果。TFT是平板显示器件的核心共有技术,决定了平板显示器的显示效果与显示质量。从TFT器件中的材料及工艺出发,分别介绍可印刷的导电材料、半导体材料和绝缘层材料,以及印刷制备TFT技术的发展现状。要实现印刷TFT技术的商业应用,还面临着诸如可印刷的高性能墨水材料开发、高均匀性薄膜印刷沉积工艺、较低的接触电阻、印刷TFT集成制备技术,以及如何实现印刷TFT在偏压、光辐照、温度等条件下的长期稳定性等问题。提出了随着新材料的进一步开发和印刷技术的发展,印刷技术将为实现低成本制造TFT提供一条有前景的途径。
【Abstract】 This article focuses on the preparation of thin film transistor(TFT) technology using solution printing technology and reviews recent advances in printing TFT materials and devices. TFT is the key common technology of flat panel display, which determine quality of flat panel displays. Generally TFT is prepared by using vacuum semiconductor technology. With the development of soluble materials and printed electronics technology, the TFT preparation by using printing technology can greatly improve material utilization, simplify processes, possible flexibility and roll to roll production processes, improved production efficiency and reduced cost, which has attracted a lot of attention. In this paper, the development of printed TFT was summarized in the terms of printable conductive materials, semiconductor materials, and insulation layer materials. Finally, the problems in printing TFT and future research directions were discussed.
【Key words】 thin film transistor; flat panel display; printing technology; solution process;
- 【文献出处】 科技导报 ,Science & Technology Review , 编辑部邮箱 ,2025年02期
- 【分类号】TS805;TN321.5
- 【下载频次】38