【摘要】 化学过滤器是一种有效去除洁净室中显著影响产品良率的气态分子污染物（Airborne Molecular Contaminants,AMC）的净化设备，与商用风机过滤单元（Fan Filter Unit,FFU）配合使用，能够为洁净室提供无尘且高度洁净的生产环境。本文基于田口-灰色关联分析方法对商用FFU与化学过滤器间的装配结构进行了结构优化设计，以FFU出口体积风量和化学过滤器进风面面风速均匀性作为优化目标，首先分别研究了静压舱的直管段高度h₁、渐缩段高度h₂、直管段边长L₁、曲率K对出口体积风量和面风速均匀性的影响规律，然后对出口体积风量和面风速均匀性综合性能进行多目标优化，得到各因素对综合性能的影响程度以及综合性能最佳的设计变量组合。结果表明:各因素对综合性能影响程度从大到小排序为渐变段高度h₂>直管段高度h₁>直管段边长L₁>曲率K;最佳设计变量组合为直管段高度为70 mm、直管段边长为599 mm、渐变段高度为80 mm、曲率为0 m^-1;最佳设计变量组合制作的静压舱有助于使含有AMC的气流均匀地通过化学过滤器，保证过滤效果的一致性和稳定性，同时满足阻力低、对系统能耗影响小的要求。更多还原

【Abstract】 A chemical filter is a kind of purification equipment that can effectively remove airborne molecular contaminants（ AMCs） that significantly affect product yield in clean rooms. When used in conjunction with commercial fan filter units（ FFUs）,it can provide a dust-free and highly clean production environment for clean rooms. This paper carried out structural optimization design based on Taguchi-grey relational analysis for the assembly between the commercial FFU and the chemical filter,taking the FFU outlet air volume and chemical filter inlet surface air velocity uniformity as the optimization objectives. First,the effects of straight pipe section height h₁,tapering section height h₂,straight pipe section side length L₁ and curvature K on the outlet air volume and surface air velocity uniformity of the hydrostatic chamber were investigated respectively,and then multi-objective optimization was carried out for the comprehensive performance of the outlet air volume and surface air velocity uniformity,to get the degree of influence of each factor on the comprehensive performance and the best combination of design variables for the comprehensive performance. The results showed that the degree of influence of each factor on the comprehensive performance is in the order of tapering section height h₂> straight section height h₁> straight section side length L₁> curvature K; the optimal combination of design variables is 70 mm straight pipe section height,599 mm straight pipe section side length,80 mm tapering section height and 0 m^-1curvature. The optimal combination of design variables produces a static pressure chamber that helps to move the air flow containing AMCs uniformly through the chemical filter,ensuring consistent and stable filtration,while meeting the requirements of low resistance and low impact on system energy consumption.更多还原