【摘要】 露点温度测量方法作为最精确的湿度测量方法，被广泛应用在武器装备的生产研制中；石英晶体因其具有高品质因数和高灵敏的质量负载效应，被用于新型谐振式精密露点仪的研制中；针对传统石英谐振露点传感器由于无法直接测量其表面温度而引入的系统误差问题，提出了一种集成热电阻的石英谐振露点传感器；通过微机电系统工艺，在石英晶体表面集成了铂热电阻，实现了对石英晶体表面温度的直接测量，从而消除了系统误差；采用理论计算和有限元分析，对传感器结构参数进行了优化设计，并通过实验验证了所设计的石英谐振露点传感器的性能；实验结果表明，集成热电阻的石英谐振露点传感器的测量精度可达±0.08℃DP,重复性小于0.11℃DP,显著提高了传统石英谐振露点传感器的测量精度。更多还原

【Abstract】 Dew point temperature measurement method, as the most accurate method for humidity measurement, is widely used in the production and development of weapon equipment; Quartz crystals, due to their high quality factor and highly sensitive mass-loading effect, are used in the development of new resonant precision dew point meters; Aiming at the system error introduced by traditional quartz resonant dew point sensors due to their inability to directly measure their surface temperature, A quartz resonant dew point sensor integrated with a thermal resistor is proposed; Through micro-electro-mechanical system(MEMS) technology, a platinum thermal resistor is integrated on the quartz crystal surface, directly measuring the quartz crystal’s surface temperature, thereby eliminating the system error; The structural parameters of the sensor are optimized and designed using theoretical calculations and finite element analysis(FEA), and experiments verify the performance of the designed quartz resonant dew point sensor; Experimental results show that the measurement accuracy of the quartz resonant dew point sensor integrated with a thermal resistor reaches up to ±0.08 ℃ DP, with a repeatability of less than 0.11 ℃ DP, significantly improving the measurement accuracy of traditional quartz resonant dew point sensors.更多还原