【摘要】 在光伏行业,传统蚀刻液会产生大量高浓度的铜、氨氮及氯等有害废液,处理流程繁琐且会造成环境污染。因此,探索绿色、高效的蚀刻方法具有重要意义。微气泡（Microbubble, MB）在酸性条件下能够生成强氧化性自由基,可望替代传统氧化性药液,实现环境友好绿色的蚀刻工艺。为深入探究微气泡-硫酸（MB-H₂SO₄）刻液在实际工程中的应用潜力,文章以异质结电池电镀铜工艺中蚀刻种子层过程为研究对象,系统考察了不同半衰期和气源的MB对蚀刻效果的影响。通过综合评估完全蚀刻时间及对透明导电氧化物（Transparent Conductive Oxide,TCO）薄膜的侵蚀情况,优化MB-H₂SO₄蚀刻液的工艺参数。研究结果显示,采用O₃作为载气,MB半衰期调控至80 s,并辅以0.6%浓度的H₂SO₄的MB-H₂SO₄蚀刻液展现出最佳蚀刻性能。该体系保证在完全蚀刻时间内,对TCO薄膜的腐蚀性极低。与传统酸性蚀刻液相比,MB-H₂SO₄蚀刻液的药液使用量降低了63%～96%,废液成分仅含水和Cu²⁺,大幅度降低了废液处理难度。因此,MB-H₂SO₄蚀刻液不仅能高效催化O₃氧化Cu种子层,还展现出良好的环境友好性,为光伏太阳能电池行业的绿色可持续发展提供了创新性的技术支撑。更多还原

【Abstract】 In the photovoltaic industry,traditional etching solutions generate significant amounts of harmful waste liquids with high concentrations of copper,ammonia nitrogen,and chlorine,necessitating cumbersome treatment processes and posing environmental pollution concerns.Therefore,exploring green and efficient etching methods is of great significance.Microbubbles,capable of generating strong oxidizing radicals under acidic conditions,offer potential as alternatives to traditional oxidizing chemicals for achieving an environmentally friendly etching process.To thoroughly investigate the application potential of microbubble-sulfuric acid（MB-H₂SO₄） etching solutions in practical engineering,this paper focuses on the etching of seed layers in the copper electroplating process for heterojunction solar cells.The study systematically examines the influence of microbubbles with different half-lives and gas sources on etching effectiveness.By comprehensively evaluating etching time and erosion of Transparent Conductive Oxide（TCO） films,the process parameters for MB-H₂SO₄ etching solutions are optimized.The results indicate that MB-H₂SO₄ etching solutions,using O₃ as the carrier gas with microbubbles having a half-life adjusted to 80 s and supplemented with 0.6%H₂SO₄,exhibit optimal etching performance.The system is guaranteed to have very low corrosivity to TCO films during the full etch time.Compared to traditional acidic etching solutions,MB-H₂SO₄ etching solutions reduce chemical usage by 63% to 96%,and the waste liquids consist solely of water and Cu²⁺,significantly simplifying waste treatment.Therefore,MB-H₂SO₄ etching solutions not only efficiently catalyze the oxidation of Cu seed layers with ozone but also show excellent environmental friendliness,providing innovative technical support for the green and sustainable development of the photovoltaic solar cell industry.更多还原