【摘要】 采用ANSYS FLUENT有限元软件对连续式高温热处理炉内部温度分布进行数值模拟，并与实测数据进行对比，平均相对误差为6.2%,验证了模型的准确性。在此基础上，研究不同移动速度、加热带结构和温度设定方式对碳化硅工件温度均匀性和加热效率的影响。结果表明：降低工件移动速度有利于提高工件的温度均匀性和加热效率，移动速度为0.025 m/min时，相较于0.033 m/min,工件顶点和中心平均温差降低14.5%;与三面连续加热和四面多段加热相比，四面连续加热可同步提高加热效率和温度均匀性，与三面连续加热相比，工件顶点与中心平均温差降低35.05%;间隔1 m一个温区加热较为合理，相较于间隔3 m一个温区加热，工件顶点和中心平均温差降低41.28%,显著提高了温度均匀性。更多还原

【Abstract】 The temperature distribution inside the continuous high temperature heat treatment furnace was numerically simulated using ANSYS FLUENT finite element software and compared with the measured data. The average relative error of 6.2% validated the accuracy of the model. On this basis, the effects of different moving speeds, heating zone structures, and temperature setting methods on the temperature uniformity and heating efficiency of silicon carbide workpieces was studied. The results show that reducing the moving speed of the workpiece is beneficial for improving the temperature uniformity and heating efficiency of the workpiece. When the moving speed is decreased from 0.033 m/min to 0.025 m/min, the average temperature difference between the vertex and center of the workpiece is reduced by 14.5%. Four-sided continuous heating configuration outperforms both three-sided continuous heating and four-sided multi-stage heating, and can simultaneously improve heating efficiency and temperature uniformity. Compared with three-sided continuous heating, the average temperature difference between the vertex and center of the workpiece is reduced by 35.05%. Heating with a temperature zone interval of 1 m is more reasonable. Compared to heating with a temperature zone interval of 3 m, the average temperature difference between the vertex and center of the workpiece is reduced by 41.28%, significantly improving temperature uniformity.更多还原