【摘要】 气相沉积薄膜技术是获得高性能薄膜材料和制备半导体器件的重要方法。通过虚拟仿真实验教学和实际实验教学的有机结合，形象显示了几种薄膜沉积微观过程的相关性和相异性，能够强化学生对几种常见薄膜沉积原理的深度理解，提高学生操作实际设备的能力。实践教学表明，虚拟仿真的实验教学效果非常明显，能够改善学生理论知识结构，增强感性认识。虚拟仿真是教学实验的有益补充，这一实验模式能够突破时空局限、降低实验成本，同时可以节省资金、空间。通过实验微观过程和实验步骤的虚拟仿真，有效提高了学生对镀膜微观过程的理解，进一步强化学生的实际动手能力，最终实现学生创新能力的再提升。更多还原

【Abstract】 The vapor deposition film technology is an important method for obtaining high-performance film and fabricating semiconductor devices. By integrating virtual simulation experiments and actual experiments teaching, the correlations and differences of microscopic processes of several film deposition are vividly displayed, which strengthens students’ understanding of the principles of these common film deposition methods. At the same time, it also enhances students’ ability to operate actual equipment. The practical teaching shows that the virtual simulation experimental has a very obvious effect on improving the teaching effect of the experimental course. Virtual simulation is a beneficial supplement to actual experiments, which can break through time and space limitations, solve problems such as high costs and save funds and space at the same time. Through the virtual simulation of the experimental microscopic process and experimental steps, it not only improves students’ understanding of the film deposition microscopic process but also strengthens their practical hands-on ability, effectively improving their innovation ability.更多还原