节点文献

电介质表面金属功能图案激光加工技术研究进展

Research Progress on Laser Processing Technology for Functional Metal Patterning on Dielectric Surfaces

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 肖荣诗; 魏佳硕; 崔梦雅; 黄婷;

【Author】 XIAO Rongshi;WEI Jiashuo;CUI Mengya;HUANG Ting;School of Materials Science and Engineering, Beijing University of Technology;School of Physics and Optoelectronic Engineering, Beijing University of Technology;

【通讯作者】 黄婷;

【机构】 北京工业大学材料科学与工程学院; 北京工业大学物理与光电工程学院;

【摘要】 电介质表面金属功能图案在航空航天、消费电子、柔性传感等领域的需求日益增长。激光加工作为一种无需掩膜的柔性制造技术,具有加工精度高、非接触式加工、制造效率高等优点,可以在多种电介质表面实现金属功能图案的直接制造,近年来发展迅速。按照自上而下和自下而上的技术路线,分别概述激光刻蚀、选择性激光烧结、脉冲激光沉积、激光诱导化学液相沉积、激光诱导化学气相沉积、激光辅助化学镀6种激光加工技术的原理和优势,及它们在电介质表面加工金属功能图案的最新研究进展,并总结相应的技术瓶颈和未来发展趋势。

【Abstract】 The demand for functional metal patterning on dielectric surfaces has been growing rapidly, driven by applications in aerospace, consumer electronics, and flexible sensing technologies. As a mask-free and flexible technique,laser manufacturing provides high precision, non-contact processing, and high efficiency, making it ideal for directly fabricating functional metal patterns on various dielectric surfaces. In recent years, significant progress has been made in this field. This review classifies six primary laser manufacturing techniques for metal patterning on dielectric surfaces into two main categories: top-down and bottom-up approaches. These include laser ablation, selective laser sintering, pulsed laser deposition, laser-induced chemical liquid deposition, laser-induced chemical vapor deposition, and laser-assisted electroless plating. The principles, advantages, and recent developments of each technique are discussed, along with an exploration of the technical challenges and future directions for development in this evolving field.

【基金】 国家重点研发计划(2022YFB4602700);北京市自然科学基金青年项目(2244087)
  • 【文献出处】 航空制造技术 ,Aeronautical Manufacturing Technology , 编辑部邮箱 ,2025年Z1期
  • 【分类号】TG665
  • 【下载频次】57
节点文献中: 

本文链接的文献网络图示:

本文的引文网络