【摘要】 为实现对复杂曲面的高精度测量，建立了基于相位测量偏折术的条纹反射法测量系统，对由相机、显示屏和待测件三者构成的测量系统的结构设计、系统标定及检测算法等进行了研究。根据待测件尺寸及面形特征精选优质显示屏和相机，分别对所选显示屏和相机进行各自标定。利用高精度关节臂测量机确定三者空间位置关系，并结合计算机辅助优化&CODEV仿真分析法标定系统。最后，利用积分重构算法实现复杂曲面的高精度检测。实验结果表明，该测量系统取得了与LUPHOScan和ZYGO&CGH相当的测量精度，对于波前RMS的测量精度优于λ/50。该测量系统结构简单、动态范围大、抗干扰能力强，提高了复杂曲面测量效率和测量精度，满足检测精度要求，为该类零件的加工和装配提供保障，从而有效提升装备性能。更多还原

【Abstract】 To enable high-precision measurement of complex surfaces, a fringe reflection measurement system based on phase measuring deflectometry was developed. The study addressed the system’s structural design, calibration procedures, and metrology algorithms for a configuration comprising a camera, a display screen, and the tested object. High-performance display screens and cameras were selected according to the object’s size and surface geometry. Instrument-specific calibrations were performed for the chosen display and camera, and the spatial relationships among the three components were established using a high-precision articulated-arm measuring device. System calibration was completed by combining computer-aided optimization with CODE V simulation analysis. Finally, an integral reconstruction algorithm was implemented to obtain high-precision surface measurements. Experimental results indicate that the proposed system achieves measurement performance comparable to LUPHOScan and ZYGO&CGH, with wavefront RMS accuracy exceeding λ/50. The system features a simple architecture, large dynamic range, and strong immunity to interference, thereby enhancing measurement efficiency and accuracy for complex surfaces and satisfying industrial processing and assembly requirements while improving equipment performance.更多还原