【摘要】 微小光电组件是一些高性能传感器件的核心部件，其装配精度对传感性能影响显著。为了克服当前装配系统构型复杂、成本高、扩展性差等缺点，本文开展微小光电组件精密装配方法研究，主要工作包括：研制了机械臂辅助的精密装配系统，并开发了小型化并联吸附装置；建立“状态冻结”与“标记点启发”相结合的视觉检测方法，按需推理世界坐标系与视觉坐标系关系，兼顾作业效率和精度；利用上述装置与方法，开展了典型光电组件的精密装配应用实验，实验结果表明：应用本文提出的机械臂辅助的装配方法，就可以将系统装配精度提高至10μm水平，突破了机械臂本身重复定位精度的限制，能够兼顾效率和精度，并且显著降低了设备的复杂度和成本，可以广泛应用于各类精密作业。更多还原

【Abstract】 Tiny optoelectronic components serve as the core elements in some high-performance sensors, where their assembly precision critically determines device performance. To address limitations in current assembly methods, such as complex configurations, high costs, and poor scalability, herein the research on the precision assembly method of tiny optoelectronic sensing components were performed. The primary contributions of this work are summarized as follows: First, a miniaturized parallel adsorption device and a robotic manipulator-assisted precision assembly system were developed. Second, considering the dual requirements of efficiency and accuracy, a two-step visual alignment method was established. This method combines "state freezing" with "marker-guided" referencing to determine the spatial relationship between coordinate systems. Finally, the assembly experiments involving miniature optoelectronic components were conducted using the developed system to validate the proposed method. Experimental results show that, by applying the robotic arm-assisted assembly method herein proposed, the assembly accuracy can be improved to the 10 μm level. This breaks through the limitation of the robotic arm’s own repeat positioning accuracy, enabling the system to balance efficiency and precision while significantly reducing the complexity and cost of the equipment. We believe that it can be widely applied to various precision operations.更多还原