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微小型MEMS-FPI近红外光谱仪

Miniaturized near-infrared spectrometer based on MEMS-FPI sensor

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【作者】 厉奔陈方方王飞郑赞胜邹益波虞益挺

【Author】 LI Ben;CHEN Fangfang;WANG Fei;ZHENG Zansheng;ZOU Yibo;YU Yiting;Key Laboratory of Scale Manufacturing Technologies for High-Performance MEMS Chips of Zhejiang Province, Key Laboratory of Optical Microsystems and Application Technologies of Ningbo City, Ningbo Institute of Northwestern Polytechnical University;Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro and Nano Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering,Northwestern Polytechnical University;Ningbo Chemgoo Pharma Tech Co.,Ltd;Ningbo Smartflow Co., LTD;

【通讯作者】 虞益挺;

【机构】 西北工业大学宁波研究院浙江省高性能MEMS芯片规模制造技术重点实验室宁波市光学微系统及应用技术重点实验室西北工业大学机电学院空天微纳系统教育部重点实验室陕西省微纳机电系统重点实验室宁波九胜创新医药科技有限公司宁波玄流智造有限公司

【摘要】 针对传统近红外光谱仪器体积庞大且成本高昂的现状,基于滨松MEMS-FPI近红外光谱传感器C14272,成功研发了工作波长为1350-1650 nm的微小型化近红外光谱仪。该系统采用模块化架构,整合高效信号获取与数据处理单元,显著降低系统成本。通过系统性能评估,包括波长精度、光谱分辨率、动态范围等指标,并通过温度特性补偿算法有效抑制了温度漂移。实验结果表明:该光谱分析系统具备优异的稳定性与重现性,光谱分辨率约为15.2 nm。结合卷积神经网络算法,构建的葡萄糖溶液浓度预测模型在检测未知样本时表现出高准确性(R~2>0.99)和低误差率(RMSE<0.2%)。所研制的微小型化近红外光谱仪为生物医学检测与食品质量分析提供了经济高效的解决方案。

【Abstract】 Traditional near-infrared spectrometers are bulky and expensive, limiting their widespread application. Based on Hamamatsu’s MEMS-FPI near-infrared spectroscopy sensor C14272, this research successfully developed a miniaturized near-infrared spectrometer operating in the 1350-1650 nm wavelength range. The system adopts a modular architecture, integrating efficient signal acquisition and data processing units, significantly reducing system costs. Through systematic performance evaluation, including wavelength accuracy, spectral resolution, dynamic range, and other metrics, combined with a temperature characteristic compensation algorithm that effectively suppresses temperature drift effects, experimental results demonstrate that this spectroscopic analysis system possesses excellent stability and reproducibility, with a spectral resolution of approximately 15. 2 nm. Combined with a convolutional neural network algorithm, the glucose solution concentration prediction model exhibits high accuracy(R~2>0. 99) and low error rates(RMSE<0. 2%) when detecting unknown samples. The developed miniaturized near-infrared spectrometer provides an economical and efficient solution for biomedical detection and food quality analysis.

【基金】 宁波市重大科技任务攻关项目(科技创新2025重大专项)(No.2022Z138);甬江引才工程“3315计划”创新团队项目(No.2021A-041-C);宁波市重点技术研发项目(No.2023T018)
  • 【文献出处】 光学精密工程 ,Optics and Precision Engineering , 编辑部邮箱 ,2025年13期
  • 【分类号】TH744.1
  • 【下载频次】30
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