【摘要】 针对增强现实光学模组中多层衍射光波导镜片叠合装配的间隔精度控制需求，提出了一种基于空心玻璃微珠的精密间隔控制方法。通过理论计算与光学模拟仿真，得出衍射光波导镜片满足成像需求所允许的间隔误差。然后，设计分选工艺，自主搭建筛分设备，获取特定粒径分布的空心玻璃微珠，并作为超精密间隔标准物质，用于精密控制衍射光波导镜片的叠合装配间隔。最后，利用自主研发的高精度衍射光波导镜片叠合系统，完成了多层衍射光波导镜片的叠合装配实验。实验结果表明：分选后的空心玻璃微珠形状良好且粒径分布更加集中，平均粒径为38.36μm，标准偏差为1.60μm；通过50组衍射光波导镜片叠合样本的间隔误差验证，62%的样本能够满足高质量成像要求，98%的样本能够满足基本成像要求。该精密间隔控制方法能够满足多层衍射光波导镜片叠合装配的间隔精度以及误差范围，具有良好的应用前景。更多还原

【Abstract】 To address the need for precise interval control in the stacking assembly of multilayer diffractive optical waveguide lenses for augmented reality optical modules, this study proposes a method utilizing hollow glass microspheres. Theoretical calculations and optical simulations are first conducted to determine the permissible interval error for achieving optimal imaging quality, establishing a foundation for practical implementation. Hollow glass microspheres with specific particle size distributions are obtained through an advanced sorting process, employing custom-designed sieving equipment to ensure high precision. These microspheres function as an ultra-precision standard material for interval control during assembly, critically maintaining the required spacing between lenses. A self-developed high-precision stacking system is employed to conduct assembly experiments. The results indicate that the sorted microspheres exhibit uniform morphology and a narrow particle size distribution, with an average diameter of 38. 36 μm and a standard deviation of 1. 60 μm. Interval error verification of 50 stacked samples reveals that 62% meet the criteria for high-quality imaging, while 98% satisfy basic imaging requirements. The proposed precision interval control method effectively ensures the stacking assembly of multilayer diffractive optical waveguide lenses adheres to the specified error range, thereby achieving the desired imaging quality and demonstrating significant potential for practical applications.更多还原