【摘要】 面向原子力显微镜（atomic force microscope, AFM）探针的应用需求，提出一种基于硅尖的垂直取向碳纳米管（carbon nanotubes, CNTs）制备方法。首先，通过优化掩膜设计和KOH湿法腐蚀工艺，制备了高度约为6μm的硅尖阵列；然后，采用图案化催化剂定位投放技术，在硅尖顶端实现了铁蛋白分子的选择性附着；最后，通过热化学气相沉积（chemical vapor deposition, CVD）法，在优化的工艺参数下，成功在硅尖上生长出直径约16～20 nm、垂直取向的单根碳纳米管。扫描电子显微镜（scanning electron microscopy, SEM）和透射电子显微镜（transmission electron microscopy, TEM）表征结果显示，所制备的CNTs结构均匀且结晶度良好；拉曼光谱分析进一步证实其具有高度石墨化特性。研究结果可为高性能AFM探针的制备提供可行的技术方案，具有重要的应用价值。更多还原

【Abstract】 This study introduces a method for preparing vertically oriented carbon nanotubes(CNTs) on silicon tips, aimed at meeting the application requirements of atomic force microscope(AFM) probes.Initially, a silicon tip array with a height of approximately 6 μm was fabricated through optimized mask design and KOH wet etching. Subsequently, a patterning technique was utilized to selectively deposit ferritin molecules as catalysts on the apex of the silicon tips. Finally, thermal chemical vapor deposition(CVD) with optimized parameters was employed to successfully grow single vertically aligned CNTs,with a diameter ranging from 16-20 nm, on the silicon tips. Characterization via scanning electron microscopy(SEM) and transmission electron microscopy(TEM) confirmed the uniform structure and high crystallinity of the CNTs. Additionally, Raman spectroscopy further verified their high degree of graphitization. The research results can provide feasible technical solutions for the preparation of highperformance AFM probes and have important application value.更多还原