【摘要】 高性能的氧化铟锡（ITO）粉体是制备高性能ITO靶材的关键。利用InCl₃·4H₂O、SnCl₄·5H₂O和氨水作为原料，在微反应器中成功合成颗粒大小均匀、分散性良好的ITO纳米粉体，该粉体比表面积为36.86 m²/g,颗粒尺寸为22.75 nm。研究了不同前驱体浓度、煅烧温度和反应温度对ITO粉体性能及其在1 400～1 580℃下的陶瓷烧结性能。在1 580℃下保温4 h烧结条件下，获得了相对密度为98.46%的ITO陶瓷，其电阻率为3.532×10^-4Ω·cm,陶瓷表面和断面均无气孔。研究结果显示，由于微反应通道内的剧烈碰撞和均匀的爆炸形核过程，利用微反应器共沉淀反应制备的ITO粉体颗粒具有较小的粒径、均匀的颗粒大小和更好的分散性。更多还原

【Abstract】 High-quality indium tin oxide（ITO） powder is crucial for fabricating high-quality ITO sputtering targets. In this paper, ITO nanopowders with uniform particle size and good dispersion were successfully synthesized in a microreactor using InCl₃·4H₂O, SnCl₄·5H₂O and ammonia as raw materials. The synthesized powder exhibited a specific surface area of 36.86 m²/g and an average particle size of 22.75 nm. The effects of precursor concentrations, calcination temperature, and reaction temperature on the properties of the ITO powder were investigated, along with its ceramic sintering behavior at 1 400-1 580 ℃. Under sintering conditions at 1 580 ℃ for 4 hours, an ITO ceramic with a relative density of 98.46% was achieved, possessing a resistivity of 3.532×10^-4 Ω·cm and exhibiting a pore-free surface and cross-section. The research findings demonstrate that ITO powder particles synthesized via coprecipitation in a microreactor exhibit smaller particle sizes, uniform particle dimensions, and enhanced dispersion, owing to intense collisions and a uniform nucleation process within the microreactor channels.更多还原