【摘要】 随着科学技术的快速发展，微纳制造领域对器件的加工精度与制备效率提出了更高要求。飞秒激光凭借其脉宽窄、瞬时功率大、非线性吸收等独特优势，成为了高精度微纳加工的核心技术，在微光学器件、生物医学工程等前沿领域展现出广阔的应用前景。但传统的逐点扫描加工模式存在效率低下的问题，难以满足日益增长的高效率、跨尺度加工需求。为此，科研人员引入光场调制技术，通过空间光调制器调控飞秒激光光场，将单焦点加工转变为多焦点阵列、线光场或面光场加工，显著提升功能性微纳结构的制备效率。本文介绍了飞秒激光双光子聚合的物理机制，阐述了光场调制加工技术的研究进展与应用案例，并从拓宽加工材料范围等方面对未来研究方向进行了展望，为光场调制技术在飞秒激光微纳加工领域的创新发展提供参考。更多还原

【Abstract】 With the rapid advancements in science and technology, the field of micro/nano-manufacturing places higher demands on the fabrication precision and production efficiency of devices. Femtosecond laser technology,leveraging its unique advantages, including ultra-narrow pulse width, high peak power, and nonlinear absorption,has emerged as a core technique for high-precision micro/nano-fabrication. It demonstrates substantial potential in frontier fields such as micro-optical devices and biomedical engineering. However, the traditional point-by-point scanning method is limited by low efficiency, making it difficult to meet the requirements for high-throughput and cross-scale manufacturing. To address this, researchers have introduced light field modulation technology. By employing a spatial light modulator to manipulate the femtosecond laser’s optical field, this approach enables the transformation of single-focus processing into multi-focus arrays, line focus processing, or plane field processing,significantly enhancing the fabrication efficiency of functional micro/nano-structures. This paper introduces the physical mechanism of femtosecond laser two-photon polymerization, elaborates on the research progress and applications of light field modulation technology, and outlines future research directions such as expanding the range of processable materials. This work serves as a reference for innovating light field modulation technology within femtosecond laser micro/nano-processing.更多还原