【摘要】 描述一种基于光反馈光腔衰荡技术的测量曲面高反射光学元件反射率空间分布的检测方法，检测装置由高稳定性折叠测试光腔和5维自由度运动控制系统组成。通过数学建模建立有准确数学描述的曲面面型上的点位置与5维运动调节量的普适性数学关系，实现了对不同曲率、不同口径、不同面型光学元件的5维动态补偿。系统采用高精度自动化扫描策略，在二维自动扫描过程中通过控制程序调整剩余维度实现深度方向和两轴角度的调节，确保扫描过程中光束与曲面法向严格对准。对检测装置的重复性进行实验验证，反射率多次重复测量误差为10^-6量级。测得的高反射元件反射率空间分布与激光共焦显微镜扫描测量的面型之间具有良好的关联性。自动扫描反射率测量分布与手动精确对准反射率测量分布具有较好的一致性。更多还原

【Abstract】 A measurement method for mapping the reflectivity distribution of curved high-reflectivity mirrors based on optical feedback cavity ring-down(OF-CRD) technique is introduced. The setup consists of a high-stability folded optical cavity and a high-precision positioning system with 5 degrees of freedom(DOF). By mathematical modeling, we established a universal mathematical relationship between the curved surface described by mathematical formula and the required adjustment for sample positioning, enabling dynamic five-dimensional compensation for optical elements with varying curvatures, apertures, and surface profiles. Through high-precision automated scanning strategy, the high-reflectivity distributions of samples with different surface profiles, apertures,and curvature diameters are obtained, this measurement is achieved by two-dimensionally raster-scanning while compensating for the other three dimensions(depth, pitch, and yaw) of the samples using a control program to ensure strict normal alignment between the probe beam and local surface throughout the measurement process. A reflectivity measurement repeatability error at the part-per-million(ppm) level is experimentally achieved. Good agreement is observed between the CRD-measured reflectivity profile and the grayscale image obtained by a laser confocal microscopy. Compared with the reflectivity values obtained by manual high-precision alignment, both reflectivity distributions obtained via automatic and manual alignments are consistent, demonstrating the reliability of the reflectivity distribution obtained with the experimental apparatus.更多还原