【摘要】 为了克服日常扫描电镜-能谱测试中常出现的纳米尺度的薄层能谱信号弱，成分分析困难问题。以镀在硅片上的30纳米钛掺杂氧化锡（Ti-SnO₂）薄层为实验样品，通过调整制样工艺与电镜测试参数探究薄层样品能谱测试优化方案。实验结果表明，适度降低加速电压、选择合适的电子束束斑、增大样品倾斜角度和镀高原子序数金属层均可以提高表面薄层在X射线“梨形”区域所占的比例，从而提高能谱结果中薄层样品元素（Ti与Sn）的含量。该结果有助于薄层样品的研究。更多还原

【Abstract】 To overcome the problem of weak nanoscale thin layer energy spectrum signals and difficulties in quantitative analysis that often occur in daily scanning electron microscopy-energy spectrum testing, using a 30 nanometer titanium doped tin oxide（Ti-SnO₂） thin layer deposited on a silicon wafer as the experimental sample,the optimization scheme for energy spectrum testing of the thin layer sample was explored by adjusting the sample preparation process and electron microscopy testing parameters. The experimental results showed that moderately reducing the acceleration voltage, selecting appropriate electron beam spot, increasing the sample tilt angle, and plating a high atomic number metal layer could all increase the proportion of surface thin layers in the X-ray "pearshaped" region, thereby increased the content of thin layer sample elements（Ti and Sn） in the energy spectrum results. This result has important reference and guidance significance for the energy spectrum composition analysis of thin-layer samples, and is helpful for the study of thin-layer samples.更多还原