【摘要】 随着多芯片组件的发展，电路装配复杂化，内部采用的封装材料和器件增多，对残余气氛控制提出更高的要求。由于腔体内部各残余气氛来源复杂，单一控制方法难以达到理想效果，针对此，采用多种手段对各来源逐一控制，然后进行密封，经过筛选试验后检测内部气氛。对比结果表明，采用本方法控制的密封腔体，内部水汽能控制在0.5%以下，氧气能控制在0.2%以下，氢气能控制在0.2%以下，取得了期望的结果。更多还原

【Abstract】 With the development of multi-chip module,complicated circuit assembly increases the encapsulation materials and devices,which increases the difficulty for controlling residual atmosphere.Because of complicated sources of various residual atmosphere,single control method is hard to achieve the desired results.With regard to this,various methods are used to control the different sources and then sealed all the samples.After screening experiments,the internal atmosphere is detected.The comparison results show that the sealed chamber controlled by this method achieves the expected results with internal water vapor energy controlled below 0.5%,oxygen energy controlled below 0.2%,and hydrogen energy controlled below 0.2%.更多还原