【摘要】 针对当前声表面波雾化器存在的热效应问题，设计制备了一种微型声表面波雾化器，采用仿真与实验结合的方法，测试分析了雾化器热失效机理，并通过信号调制驱动提升雾化性能，实现低功率条件下的快速雾化。结果表明，对于丙二醇、无水乙醇和去离子水这三种理化性质各异的典型雾化液，信号调制分别将其雾化速率最大提升97%,145%和187%,同时降低了所需驱动功率，从而增强了雾化器的工作稳定性与可靠性。同时探究了雾化器工作时表面热分布，系统分析了不同功率下最大热应力及热失效机理。进一步发现，调制深度100%,调制频率1 kHz的幅度调制信号优化效果最显著。更多还原

【Abstract】 Aiming at the thermal effect of the current nebulizer, a miniature surface acoustic wave nebulizer was designed and fabricated. The thermal failure mechanism was tested and analyzed, and the signal modulation was applied to achieve faster nebulization under lower power. The results demonstrate that for three typical fluids(propylene glycol, anhydrous ethanol and deionized water) with different physicochemical properties, the utilization of the signal modulation method could improve the nebulization rate by 97%, 145%, 187%, respectively with reduced driving power, so the reliability of nebulizer is enhanced. The surface heat distribution of the nebulizer, the maximum thermal stress level and thermal failure mechanism were systematically analyzed. The modulation signal with a modulation depth of 100% and modulation frequency of 1 kHz exhibits the optimal performance.更多还原