【摘要】 随着MEMS技术在空间探测、核能工程等极端辐射环境中的广泛应用，其辐射可靠性问题日益凸显。系统分析了基于不同工作原理（静电驱动、压阻传感、压电转换等）的MEMS器件在辐射环境下的失效机理，重点总结了电离辐射、位移损伤等效应对器件性能的影响规律。详细评述了从材料优化、结构设计到工艺改进的抗辐射加固技术研究进展。最后，针对未来深空探测、核反应堆监测等应用需求，提出了MEMS抗辐射加固技术的发展趋势和研究方向，为高可靠MEMS器件的设计与应用提供参考。更多还原

【Abstract】 With the widespread application of MEMS technology in extreme radiation environments such as space exploration and nuclear engineering, the issue of radiation reliability has become increasingly prominent. The failure mechanisms of MEMS devices based on different working principles(electrostatic actuation, piezoresistive sensing, piezoelectric conversion, etc.) under radiation environments are systematically analyzed, with particular focus on the effects of ionizing radiation and displacement damage on device performance. A comprehensive review is presented on recent advances in radiation-hardening technologies, encompassing material optimization, structural design, and process improvements. Furthermore,addressing future application requirements in deep-space exploration and nuclear reactor monitoring, the development trends and research directions for radiation-hardened MEMS are proposed, providing valuable insights for the design and application of highly reliable MEMS devices.更多还原