【摘要】 加速度传感器是航空航天及国防装备惯性导航、振动监测的关键器件，其工作过程中可能面临高冲击过载导致功能失效。为了满足高冲击过载场合对微机电系统(MEMS)加速度传感器抗冲击过载能力的要求，设计了一种抗高过载电容式加速度传感器，采用“刚柔”结合的抗过载结构限位方案，具备刚性限位结构刚度大、可靠性强与柔性非线性限位结构不易崩裂、可吸收冲击能量的特点；分析了结构阻尼及模态分离比，对关键尺寸进行多参数综合优化，进一步提升了面外抗冲击能力与检测灵敏度。性能标定与落锤冲击试验表明，敏感芯片封装后量程达到±20 g,分辨率为0.5 mg,灵敏度幅值线性度为0.067%,并可抵抗面内和面外3500 g的冲击加速度，具备良好的综合性能及抗冲击特性。更多还原

【Abstract】 Accelerometer is a key device for inertial navigation, vibration monitoring in aerospace and national defense equipment. It may face high-impact overload during its working process, resulting in functional failure. In order to meet the requirements for the impact overload resistance of MEMS accelerometers in high-impact overload scenarios, a high overload resistance capacitive accelerometer is designed in this paper, which adopts the “rigid + flexible” overload resistance structure limit scheme, with the characteristics of high rigidity, strong reliability of rigid limit structure, and flexible nonlinear limit structure is not easy to collapse, can absorb the impact energy. The structural damping and modal separation ratio are analyzed, and the key dimensions are comprehensively optimized to further improve the out-of-plane impact resistance and detection sensitivity. The performance calibration and drop hammer experiment show that the encapsulated sensitive chip has a measurement range of ±20 g, a resolution of 0.5 mg, a sensitivity amplitude linearity of 0.067%, and can resist the in-plane and out-of-plane impact acceleration of 3500 g, which is a good combination of performance and impact resistance characteristics.更多还原