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铜表面粗糙度对光散射偏振特性的影响
Effect of Copper Surface Roughness on Polarization Characteristics of Light Scattering
【摘要】 铜作为光学反射器件的重要材料,其表面粗糙度直接影响产品的光学性能。本研究通过建立物理型偏振双向反射分布函数模型,系统分析了粗糙度对铜表面偏振散射特性的影响机制。该模型采用Ground Glass X(GGX)法线分布函数描述微面元统计特性,结合Smith联合遮蔽阴影函数处理多次散射效应,并通过非线性最小二乘法反演关键参数。通过偏振BRDF测量系统获取了不同粗糙度铜样片的线偏振度(DoLP)数据。结果表明,DoLP随粗糙度变化呈非单调性,先增后减。该现象源于低粗糙度下表面等离子体共振(SPR)的偏振增强效应与高粗糙度下多重散射的退偏振效应之间的竞争。同时,DoLP峰值入射角随粗糙度增加向大角度迁移,表明粗糙度对s/p偏振光存在非对称调制作用。实验测量与仿真结果吻合良好,验证了所建pBRDF模型的有效性和预测精度。本研究明确了DoLP作为光学表征参量对铜表面微观结构的敏感性,为基于偏振探测的表面质量无损评估提供了新方案,对光学反射器件中的表面处理工艺具有重要理论指导意义。
【Abstract】 As an important material for optical reflective devices,the surface roughness of copper directly affects the optical properties of products. This study systematically analyzed the influence mechanism of roughness on the polarization scattering characteristics of copper surfaces by establishing a physical-type polarization bidirectional reflectance distribution function model. This model employs the Ground Glass X(GGX)distribution function to describe the statistical properties of microfacets,incorporates the Smith Joint Masking-Shadowing Function to handle multiple scattering effects,and uses nonlinear leastsquares inversion to determine key parameters. Linear polarization degree(DoLP)data for copper specimens with varying roughness levels were obtained using a polarization BRDF measurement system. The results indicate that DoLP exhibits non-monotonic behavior with roughness,first increasing and then decreasing. This phenomenon arises from the competition between the polarization enhancement effect of surface plasmon resonance(SPR)at low roughness and the depolarization effect of multiple scattering at high roughness. Simultaneously,the peak DoLP incidence angle shifts toward larger angles with increasing roughness,indicating that roughness exerts an asymmetric modulation effect on s/p-polarized light. The experimental measurements showed good agreement with the simulation results,validating the effectiveness and predictive accuracy of the constructed pBRDF model. This study clarified the sensitivity of DoLP as an optical characterization parameter to the microstructure of copper surface,and provided a new scheme for the nondestructive evaluation of surface quality based on polarization detection,which has important theoretical significance for the surface treatment process in optical reflective devices.
【Key words】 polarized scattering; pBRDF model; DoLP; rough surface; surface characterization;
- 【文献出处】 长春理工大学学报(自然科学版) ,Journal of Changchun University of Science and Technology(Natural Science Edition) , 编辑部邮箱 ,2025年05期
- 【分类号】O436.3;TG146.11
- 【下载频次】6