【摘要】 借助扫描电子显微镜、X射线光电子能谱、透射电子显微镜和纳米压痕仪研究不同热氧化温度和时间条件下,NiTi合金表面氧化层组织结构和纳米力学性能。结果表明,500℃和600℃氧化时能够确保合金表面生成完整连续的TiO₂氧化层,氧化层厚度可达1.1μm;TiO₂氧化层的生长主要受Ti元素的向外扩散控制,且TiO₂生长方向几乎垂直于基体表面。热氧化后NiTi合金表面的变形行为仍以塑性变形为主,500℃氧化16 h后,NiTi合金具有最优抗塑性变形能力,其Hardness/Elastic modulus和（Hardness）3/（Elastic modulus）²最高,分别为0.071与0.035,合金表面形成的致密TiO₂氧化层有效提升了合金表面硬度和抗塑性变形能力。更多还原

【Abstract】 Scanning electron microscopy,X-ray photoelectron spectroscopy,transmission electron microscopy,and nanoindenter were used to study the microstructure and nanomechanical properties of the surface oxide layer of NiTi alloy under different thermal oxidation temperatures and times.The results show that the oxidation at 500℃ and 600℃ can ensure the formation of a complete and continuous TiO₂ oxide layer on the alloy surface.The thickness of TiO₂ oxide layer is up to 1.1 μm.The growth of TiO₂ oxide layer is mainly controlled by the outward diffusion of Ti elements,and the growth direction of TiO₂ is almost perpendicular to the substrate surface.The deformation behavior of NiTi alloy surface after thermal oxidation is still dominated by plastic deformation.After oxidation at 500℃ for 16 hours,NiTi alloy had the best anti-plastic deformation ability,and its highest Hardness/Elastic modulus and（Hardness）3/（Elastic modulus）2 were the highest,which were 0.071 and 0.035,respectively.The dense TiO₂ oxide layer formed on the alloy surface effectively improves the surface hardness and resistance to plastic deformation of the alloy.更多还原