【摘要】 干式真空泵作为一种机械真空泵，具有抽速范围宽、抽气腔内无油、元件无摩擦、能耗低、耐腐蚀等优点。因其泵腔内无油或其他工作介质，可以提供相对洁净的真空环境，目前已经成为微电子、半导体、精密加工、新能源装备等行业首选的真空获得设备。本文简述了干式真空泵在半导体制备及新能源装备制造行业中的应用场景，举例说明了部分干式真空泵的产品特性，总结了国内干式真空泵行业发展空间及面临的挑战。更多还原

【Abstract】 As a mechanical vacuum pump, dry vacuum pump has the advantages of wide pumping speed range, no oil in the pumping chamber, no friction of components, low energy consumption and corrosion resistance. It has become the preferred vacuum acquisition equipment in microelectronics, semiconductor, precision machining, new energy equipment and other industries at present,because there is no oil or other working medium in the pump chamber, and it can provide a relatively clean vacuum environment. In this paper, the application scenarios of dry vacuum pump in semiconductor preparation and new energy equipment manufacturing industry are briefly described. The product characteristics of some dry vacuum pumps are explained. The development space and challenges of domestic dry vacuum pump industry are summarized.更多还原