【摘要】 基于对人类社会发展历史和科学技术发展内在规律的认识，本文详细分析了制造发展的三个范式，论证了原子及近原子尺度制造是制造范式III的核心使能技术。文章回顾了国内外各机构对原子级制造研发规划现状，指出我国目前处于原子级制造技术发展的重要战略机遇期，并从设计、材料、加工和检测等角度分析了原子级制造的技术体系内涵；梳理了原子级表面制造、原子级结构制造、原子级测量与表征等领域的研究进展，呈现了当前具有原子级制造能力的部分代表性技术，包括原子级切削、原子级抛光、电化学加工、等离子体原子级加工技术、原子精准操控以及原子分辨测量与表征技术，并对原子级制造战略规划提出发展建议。更多还原

【Abstract】 This article comprehensively discusses three paradigms of manufacturing advancement based on the inherent laws of scientific and technological development. It highlights that atomic-and close-to-atomic-scale manufacturing(ACSM) is the fundamental technology of Manufacturing Paradigm Ⅲ. Furthermore, the article introduces the current status of the development of ACSM, indicating that this technology is currently in a critical strategic opportunity period for development. Moreover, the connotation of the technical system of ACSM is analyzed from the perspectives of design, materials, processing, and measurement. The article summarizes the current research progress in the fields of atomically smooth surface manufacturing, atomic-scale feature manufacturing, and atomic-scale measurement and characterization; further, it reviews potential ACSM technologies, including atomic cutting, atomic polishing, atomic electrochemical machining, atomic plasma processing, atomic manipulation, and atomic-scale measurement and characterization. In addition, the article provides guidance for ACSM development in the future.更多还原