【摘要】 研究了一种基于微机电系统(MEMS)技术用于高压测量的硅-玻光纤法布里-珀罗(FP)压力传感器。该传感器以硅材料作为敏感元件，将电感耦合等离子体(ICP)干法刻蚀后的单晶硅膜片和高硼硅玻璃阳极键合构成FP腔。传感头使用MEMS技术批量制造，结构稳定、抗过载能力强、在高压环境下不容易失效。实验结果表明，该传感器能够实现30 MPa的高压压力测量，灵敏度为46.94 nm/MPa，线性拟合度为0.998 97，测量结果具有较好的一致性和可靠性，所设计的压力传感器在高压检测方面有很强的应用前景。更多还原

【Abstract】 We investigate a silicon-glass fiber-optic Fabry-Perot(FP) pressure sensor based on Micro-Electro-Mechanical Systems(MEMS) technology for high-pressure measurements. Silicon material was used as the sensitive element, and the Inductively Coupled Plasma(ICP) dry-etched monocrystalline silicon diaphragm was anode bonded with a high borosilicate glass to form the FP cavity. The sensor head was manufactured in batches utilizing MEMS technology, which is structurally stable, strongly resistant to overload,and not prone to fail in high-pressure environments. The experimental results show that the sensor can acheive high-pressure measurements up to 30 MPa with a sensitivity of 46.94 nm/MPa and a linearity of 0.998 97, with high consistency and reliable measurement results. The designed pressure sensor has strong application prospects in high-pressure sensing.更多还原