【摘要】 针对量子科学试验、精密制造等先进应用对亚赫兹微振动的抑制需求，研究基于准零刚度支撑结构和分离式音圈作动器的低频主动隔振技术。首先，给出一种低频主动隔振平台设计方法，考虑准零刚度结构的等效动力学特性，采用牛顿-欧拉方法建立平台的动力学模型；然后，基于所建立动力学模型分析多自由度耦合下平台的扰动传递特性并设计主动隔振算法；最后，研制低频主动隔振平台进行试验验证。试验结果表明，所开发主动隔振平台能够在三个线自由度上实现优于98.3%的微振动抑制效果，在0.1～10.0 Hz内载荷z方向微振动小于1.3×10^-8 g。更多还原

【Abstract】 Aiming at the isolation requirements of sub-Hz micro-vibration of advanced applications such as quantum science experiments and precision manufacturing, low-frequency active vibration isolation technology based on quasi-zero stiffness supporting structures and non-contact voice coil actuators were studied. First, a low-frequency active vibration isolation platform design method was proposed, while the dynamic model of the platform was established by the Newton-Euler method considering the equivalent dynamics of quasi-zero stiffness structure. Then, the disturbance transfer characteristics of the platform with multi-degree-of-freedom coupling were analyzed, the active vibration isolation control algorithm was designed and vibration isolation simulation was carried out. Finally, a low-frequency active vibration isolation platform was developed for experimental verification. Experimental results illustrate that the developed platform can achieve micro-vibration suppression effect of better than 98.3% in three directions. In frequency range of 0.1-10.0 Hz, the micro-vibration in the z-direction of the payload is less than 1.3×10^-8 g.更多还原