【摘要】 从原理上分析了单层膜和法布里-珀罗谐振腔（Fabry-Parot cavity,FP腔），并使用Zemax软件的膜层设计工具对分光比膜和FP腔进行了建模，分析了不同折射率材料单层膜的反射率和透射率随波长的变化关系。对FP腔的模型进行简化分析，用3 mm间距的空气隙FP腔进行了反射率和透射率初步验证。设计了一款通讯常用的50 GHz的光学标准具，并介绍了一种基于自聚焦透镜准直器的在线光学标准具生产方案。通过设计，控制自聚焦透镜平面分光比膜的透射率和反射率，调整2个自聚焦透镜准直器之间的距离，达到控制FP腔的峰值、谷值透射率和自由光谱范围（free spectral range,FSR）等参数的目标。通过Zemax建模，发现模拟和样品的参数值基本一致。分析了样品间差异、光谱峰值透射率的差异和光谱相位差异。使用Zemax分析FP标准具方便直观，为FP的设计与分析提供了一种新方法。更多还原

【Abstract】 The single-layer coating and Fabry-Parot resonant cavity(FP cavity) were analyzed in principle, and the tap coating and FP cavity were modeled using the coatings tool of Zemax software. The reflectance and transmittance of single-layer coating with different refractive index materials were analyzed with respect to wavelength. The model of FP cavity was simplified and analyzed, and the reflectance and transmittance were preliminarily verified with an air-gap FP cavity with 3 mm gap. A fiber optical etalon of 50 GHz commonly used in communication was designed, and a production scheme of in-line optical etalon based on Glens collimator was introduced. Through the design, the transmittance and reflectance of the spectral ratio film of the Glens plane were controlled, and the distance between two Glens collimators was adjusted to achieve the control of the peak value, valley value transmittance and free spectral range(FSR) parameters of the FP cavity.Through the simulation, the parameters of the simulation and samples were obtained to be basically the same.The inter-sample differences, differences in spectral peak transmittance and spectral phase differences were also analyzed. Analysis of FP etalon by Zemax is convenient and intuitive, which provides a new method for FP design and analysis.更多还原