【摘要】 声发射传感器广泛应用于装备实时健康检测，而传统使用的压电陶瓷换能器存在体积大、能耗高、难集成及成本高等问题，因此设计了基于ScAlN的六边形压电薄膜声发射传感器。该传感器的体积为SymbolFC@18 mm×6 mm,在40～500 kHz带宽内，其表面波和纵波灵敏度均高于60 dB[Ref.V/(m/s)]。通过匹配层设计和封装后，搭建了齿轮故障检测系统，能有效区分正常齿轮和断齿信号。测试结果表明，基于微机电系统(MEMS)的压电薄膜声发射传感器可同时兼顾高灵敏度和微型化，在齿轮故障诊断方面具有较高的可靠性和准确性。更多还原

【Abstract】 Acoustic emission sensors are widely used in real-time health detection of equipment. The traditional piezoelectric ceramic transducers have the problems of large volume, high energy consumption, difficult integration and high cost. In this paper, a hexagonal piezoelectric film acoustic emission sensor based on ScAlN is designed. The volume is SymbolFC@18 mm×6 mm. The sensitivity of surface wave and longitudinal wave is higher than 60 dB[Ref.V/(m/s)] in the bandwidth of 40-500 kHz. After the design and packaging of the matching layer, the gear fault detection system is built, which can effectively distinguish the normal gear and the broken tooth signal. The test results show that the piezoelectric film acoustic emission sensor based on Micro-Electro-Mechanical Systems(MEMS) has both high sensitivity and miniaturization, and has high reliability and accuracy in gear fault diagnosis.更多还原