【摘要】 随着引信微小型化和智能化不断发展，电磁兼容性要求不断提升，对其安全系统提出了更高的要求。基于微光机电系统(MOEMS)技术的器件具有体积小、重量轻、能耗低、集成度高和可批量生产等特点，在引信安全系统中有较好的应用前景。对引信MOEMS安全系统的国内外研究现状开展分析，介绍了引信MOEMS安全系统的基本原理，分析了MOEMS安全系统驱动方式、加工与封装工艺、激光起爆技术与安全系统性能测试方法的现状与发展规律，归纳了当前引信MOEMS安全系统研制过程中亟待解决的问题，为推动MOEMS安全系统在火炮引信中的应用提供重要的借鉴。更多还原

【Abstract】 The continuous development of fuze miniaturization and intelligentialize, and the electromagnetic compatibility requirements continue to improve, which cause higher requirements for the safety system. The MOEMS devices have obvious advantages in fuze safety system application for their small volume, light weight, low energy consumption, high integration and batch fabrication. This paper analyzed the research status of fuze MOEMS safety system at home and abroad. Firstly, the working principle of fuze MOEMS safety system was introduced. Then, the present status and development trend of MOEMS safety system driving mode, fabrication and packaging process, laser initiation technology and safety system performance test method were analyzed in turn. Finally, the problems that need to be solved in the development of fuze MOEMS safety system were summarized. It could provide an important reference for promoting the application of MOEMS safety system in artillery fuze.更多还原