【摘要】 针对高速高精度的激光微加工应用，提出一种基于并行处理架构的全数字控制双轴振镜驱动系统设计方案，在高频数字控制下实现了双轴振镜的高动态实时控制。通过建立振镜系统数学模型，以串级闭环控制为基础，采用模型跟踪控制策略提升了位置跟踪性能。实验结果表明所设计的双轴振镜控制系统能够有效提升动态响应速度、降低跟踪误差，满足期望工作性能指标更多还原

【Abstract】 For high-speed, high-precision laser micro-processing applications, a design solution for a fully digital control dual-axis galvanometer drive system based on parallel processing architecture was proposed in this paper. High dynamic real-time control of dual-axis galvanometer can be achieved by high-frequency digital control. By establishing a mathematical model of the galvanometer system, the position tracking performance was improved further using a model following control strategy based on cascade closed-loop control. Experimental results were obtained to verify that the designed dual-axis galvanometer control system could effectively improve dynamic response speed, reduce tracking errors, and meet the expected working performance.更多还原