【摘要】 高速钢表面类金刚石（diamond-like carbon, DLC）薄膜的沉积效率和膜-基结合力影响其在切削刀具领域的应用。基于空心阴极原理，利用等离子体增强化学气相沉积（plasma-enhanced chemical vapor deposition, PECVD）的方法，在体积比为1∶3的CH₄和C₂H₂的混合气体中加入N₂在高速钢表面制备类金刚石薄膜，研究了N₂体积分数对DLC薄膜结合力和耐磨性的影响。结果表明：掺氮可提高DLC薄膜的沉积效率，改善膜结构。随着N₂体积分数的增加，DLC薄膜中sp³键含量和摩擦因数均先增大后减小。掺10%体积分数N₂的DLC薄膜厚度达1 543 nm,膜-基结合力等级从HF4提高到HF2,摩擦因数降至0.139,耐磨性提高。更多还原

【Abstract】 Deposition efficiency of diamond-like carbon（DLC） film and strength of adhesion of the film to the substrate on the high speed steel affect its application in the field of cutting tools. Based on the principle of hollow cathode, the DLC films were prepared on the high speed steel by plasma-enhanced chemical vapor deposition（PECVD） method and by adding N₂to a mixed gas consisting of CH₄ and C₂H₂ with a volume ratio of 1 to 3, and the effects of doping nitrogen on the adhesion strength and wear resistance of DLC films were studied. The results showed that the deposition efficiency and the structure of DLC films could be improved by doping nitrogen. As the volume fraction of N₂ increased, the sp³ bond content and friction coefficient of DLC films increased at first and then decreased. The DLC films to which 10% N₂ by volume was doped exhibited a thickness of 1 543 nm, the level of strength of adhesion of the film to the substrate increasing from HF4 to HF2, a friction coefficient being as low as 0.139, and therefore showing the better wear resistance.更多还原