【摘要】 采用飞行时间二次离子质谱法对CaF₂晶体、YF₃薄膜和Au薄膜中的痕量氧元素进行测试。结果表明：通过改变分析离子源光阑大小来改变离子束流，进而改变作用在试样表面的单位面积离子剂量，当离子束流增大时，CaF₂晶体与YF₃薄膜的氟离子、氧离子产额均增加，表明CaF₂晶体与YF₃薄膜中存在氧元素，测试结果与CaF₂的紫外光谱测试结果和YF₃薄膜的红外光谱测试结果相吻合；当离子束流增大时，金离子产额增加，而氧离子产额无明显变化，说明检测到的氧元素来自试验环境中的残余气体，Au膜中不存在氧元素。更多还原

【Abstract】 Trace oxygen elements in CaF₂ crystal, YF₃ thin films and Au thin films were tested using time of flight secondary ion mass spectrometry. The results show that by changing the size of the analytical ion source aperture to change the ion beam current, the unit area ion dose acting on the sample surface was changed. As the ion beam current increased, the fluoride and oxygen ion yields of CaF₂ crystal and YF₃ film both increased, indicating the presence of oxygen in CaF₂ crystal and YF₃ film. The test results were consistent with the UV spectrum test results of CaF₂ and the infrared spectrum test results of YF₃ film. When the ion beam current increased, the Au ion yield increased, while the oxygen ion yield showed no significant change, indicating that the detected oxygen element came from residual gas in the experimental environment, and there was no oxygen element present in the Au film.更多还原