【摘要】 为了获得大能量的深紫外超短脉冲,将深紫外飞秒种子光通过ArF准分子放大器进行放大。通过对种子光信号和准分子放大器的荧光信号进行测量,在不同环境下,针对种子光信号与放大器放电信号之间的延时对脉冲单程放大特性的影响进行了研究。研究结果表明,放大系统实现了种子光与准分子放大器的低抖动精确同步,空气和氮气环境下脉冲能量最高分别为197.2μJ和312.6μJ,且氮气环境下脉冲展宽较空气平均降低99.2 fs。相较于空气环境,氮气环境可有效降低深紫外超短脉冲的能量衰减与脉冲展宽,且同步抖动对放大特性影响较小。更多还原

【Abstract】 In order to obtain deep ultraviolet(UV) ultrashort pulses with large energy, deep UV femtosecond seed light is amplified by an ArF excimer amplifier. By measuring the seed light signal and the fluorescence signal of the excimer amplifier, the effect of the delay between the seed light signal and the amplifier discharge signal on the single amplification characteristics of the pulse was investigated under different environments. The results show that the amplification system achieves precise synchronization of seed light and excimer amplifier with low jitter, the maximum pulse energy in air and nitrogen is 197.2 μJ and 312.6 μJ, respectively, and the pulse spreading in nitrogen environment is reduced by 99.2 fs on average compared with in air. It is proved that compared to air environment,nitrogen environment can effectively reduce the energy decay and pulse spreading of deep UV ultrashort pulses, and synchronous jitter has less influence on amplification characteristics.更多还原