【摘要】 为了研究旋转超声磨削Si₃N₄陶瓷表面的微观形貌，基于分形理论研究不同加工参数下Si₃N₄陶瓷表面微观形貌的变化。设计旋转超声磨削Si₃N₄陶瓷正交试验，对比分析不同加工参数对Si₃N₄陶瓷表面分形维数和多重分形谱的影响，并设计单因素试验研究不同加工参数下Si₃N₄陶瓷表面的粗糙度、分形维数和多重分形谱。结果表明：旋转超声磨削Si₃N₄陶瓷表面时，分形维数能更好地表征其加工表面的缺陷状态，多重分形谱则能更好地表征其加工表面缺陷的起伏程度变化。更多还原

【Abstract】 To study the surface morphology of Si₃N₄ ceramics using rotary ultrasonic grinding,changes in the surface morphology under different machining parameters were analyzed based on fractal theory.Orthogonal experiments were designed to compare and analyze the effects of various processing parameters on the fractal dimensions and multifractal spectra of the Si₃N₄ ceramic surface.Additionally,single-factor experiments were conducted to study the roughness fractal dimensions,and multifractal spectra of the Si₃N₄ ceramic surface under different processing parameters.The results show that fractal dimensions can effectively characterize the defect state of the processed surface of Si₃N₄ ceramics during rotary ultrasonic grinding,while multifractal spectra can better represent the degree of fluctuation in surface defects.更多还原