【摘要】 硅光子调制器是硅基光学链路中重要的电光转换元件，而行波电极作为硅光调制器承载微波信号的关键部分，其性能是决定调制器的调制效率和传输损耗的关键因素。目前，行波电极的设计主要分为共面波导结构(Coplanar Waveguide, CPW)和共面带状线结构(Coplanar Stripline, CPS),共面带状线相对于共面波导具有更大的设计匹配范围，但信号屏蔽能力会低于CPW的双接地系统，导致高阶模式激发和多模干涉等问题出现。为优化调制器性能，许多学者提出手指形延伸电极，T型延伸电极，分段电极等形状来优化电极结构，实现阻抗匹配的同时，增强电光相互作用并降低传输损耗。本文综述了国内外学者对于行波电极的研究成果，并对行波电极的发展趋势进行了分析与展望。更多还原

【Abstract】 Silicon photonic modulator is an important electro-optical conversion element in silicon-based optical links, and the performance of traveling wave electrode, as a key part of silicon optical modulator carrying microwave signals, is a core factor in determining the modulation efficiency and transmission loss of the modulators.Currently, the design of traveling wave electrodes is mainly divided into coplanar waveguide structure and coplanar stripline structure.A coplanar stripline has a larger design matching range with respect to a coplanar waveguide, but the signal shielding capability is lower than that of the CPW′s double-grounded system, which leads to the emergence of problems such as higher-order mode excitation and multimode interference.In order to optimize the modulator performance, many scholars have proposed finger-shaped extension electrodes, T-shaped extension electrodes, segmented electrodes, and other shapes to optimize the electrode structure to achieve impedance matching while enhancing electro-optical interactions and reducing the transmission loss.This paper summarizes the research results of domestic and foreign scholars on traveling wave electrodes, and analyzes and prospects the development trend of traveling wave electrodes.更多还原